N2-Plasma Activated Bonding for GaInAsP/SOI Hybrid Lasers

Publication Information

Title

Japanese:
English:	N2-Plasma Activated Bonding for GaInAsP/SOI Hybrid Lasers

Author

Japanese:	西山伸彦, 林侑介, 鈴木純一, 荒井滋久.
English:	Nobuhiko Nishiyama, Yuusuke Hayashi, Junichi Suzuki, Shigehisa Arai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 17, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2017 5th International Workshop on Low Tempereature Bondning for 3D Integration

Conference site

Japanese:
English:	Tokyo