Crystal orientation effect on local adhesion strength of the interface between a damascene copper line and the insulation layer

Publication Information

Title

Japanese:
English:	Crystal orientation effect on local adhesion strength of the interface between a damascene copper line and the insulation layer

Author

Japanese:	Nobuyuki Shishido, Yuka Oura, Hisashi Sato, Shoji Kamiya, Kozo Koiwa, 大宮正毅, Masahiro Nishida, Takashi Suzuki, 中村友二, Takeshi Nokuo, Toshiaki Suzuki.
English:	Nobuyuki Shishido, Yuka Oura, Hisashi Sato, Shoji Kamiya, Kozo Koiwa, Masaki Omiya, Masahiro Nishida, Takashi Suzuki, Tomoji Nakamura, Takeshi Nokuo, Toshiaki Suzuki.

Language

English

Journal/Book name

Japanese:
English:	Microelectronic Engineering

Volume, Number, Page

Volume 120 Page 71-76

Published date

May 25, 2014

Publisher

Japanese:
English:	Elsevier

Conference name

Japanese:
English:

Conference site

Japanese:
English: