Vacancy-type defects induced by grinding of Si wafers studied by monoenergetic

Publication Information

Title

Japanese:
English:	Vacancy-type defects induced by grinding of Si wafers studied by monoenergetic

Author

Japanese:	上殿明良, 水島賢子, YOUNGSUK KIM, 中村友二, 大場隆之, Nakaaki Yoshihara, 大島永康, 鈴木良一.
English:	Akira Uedono, Yoriko Mizushima, Youngsuk Kim, Tomoji Nakamura, Takayuki Ohba, Nakaaki Yoshihara, Nagayasu Oshima, Ryoichi Suzuki.

Language

English

Journal/Book name

Japanese:
English:	Journal of Applied Physics

Volume, Number, Page

Vol. 116 134501

Published date

2014

Publisher

Japanese:
English:	AIP

Conference name

Japanese:
English:

Conference site

Japanese:
English: