Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration (~1 × 10¹⁶atoms/cm³) in thin-film samples;

Publication Information

Title

Japanese:
English:	Highly hydrogen-sensitive thermal desorption spectroscopy system for quantitative analysis of low hydrogen concentration (~1 × 10¹⁶atoms/cm³) in thin-film samples;

Author

Japanese:	半那拓, 平松秀典, 坂口勲, 細野秀雄.
English:	Taku Hanna, Hidenori Hiramatsu, Isao Sakaguchi, Hideo Hosono.

Language

English

Journal/Book name

Japanese:
English:	Review of Scientific Instruments

Volume, Number, Page

88 053103-1 -13

Published date

May 2, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI