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Publication Information
Title
Japanese:
English:
Effects of substrate surface composition and deposition temperature on deposition of flat and continuous Ru thin films
Author
Japanese:
千葉 洋一
, Masaki HIRANO,
河野 和久
, Noriaki OSHIMA,
舟窪 浩
.
English:
Hirokazu CHIBA
, Masaki HIRANO,
Kazuhisa KAWANO
, Noriaki OSHIMA,
Hiroshi FUNAKUBO
.
Language
English
Journal/Book name
Japanese:
English:
Journal of the Ceramic Society of Japan
Volume, Number, Page
vol. 124 no. 6
Published date
June 1, 2016
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.2109/jcersj2.16024
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Tokyo Institute of Technology All rights reserved.