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Publication Information
Title
Japanese:
English:
Growth of (111)-oriented epitaxial and textured ferroelectric Y-doped HfO2 films for downscaled devices
Author
Japanese:
Kiliha Katayama,
清水 荘雄
,
坂田 修身
, Takahisa Shiraishi, Syogo Nakamura,
木口 賢紀
, Akihiro Akama,
Toyohiko J. Konno
,
内田 寛
,
舟窪 浩
.
English:
Kiliha Katayama,
Takao Shimizu
,
Osami Sakata
, Takahisa Shiraishi, Syogo Nakamura,
Takanori Kiguchi
, Akihiro Akama,
Toyohiko J. Konno
,
Hiroshi Uchida
,
Hiroshi Funakubo
.
Language
English
Journal/Book name
Japanese:
English:
Appl. Phys. Lett.
Volume, Number, Page
vol. 109 pp. 112901-1-5
Published date
Sept. 12, 2016
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
DOI
https://doi.org/10.1063/1.4962431
©2007
Tokyo Institute of Technology All rights reserved.