Growth of Orientation-Controlled Ferroelectric HfO2 Thin Films for Next Generation Ferroelectric Devices

Publication Information

Title

Japanese:
English:	Growth of Orientation-Controlled Ferroelectric HfO2 Thin Films for Next Generation Ferroelectric Devices

Author

Japanese:	舟窪浩, 三村和仙, Kiriha Katayama, 清水荘雄, 内田寛, 木口賢紀, Akihiro Akama, Toyohiko Konno, 坂田修身.
English:	Hiroshi Funakubo, Takanori Mimura, Kiriha Katayama, Takao Shimizu, Hiroshi Uchida, Takanori Kiguchi, Akihiro Akama, Toyohiko Konno, Osami Sakata.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 7, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ISCSI-Ⅶ/ISTDM 2016

Conference site

Japanese:
English:	Nagoya