Growth of orientation-controlled ferroelectric HfO2 thin films by solid phase crystallization and their characterization

Publication Information

Title

Japanese:
English:	Growth of orientation-controlled ferroelectric HfO2 thin films by solid phase crystallization and their characterization

Author

Japanese:	三村和仙, Kiriha Katayama, 清水荘雄, 内田寛, 木口賢紀, Akihiro Akama, Toyohiko J. Konno, 坂田修身, 舟窪浩.
English:	Takanori Mimura, Kiriha Katayama, Takao Shimizu, Hiroshi Uchida, Takanori Kiguchi, Akihiro Akama, Toyohiko J. Konno, Osami Sakata, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 19, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2016 Joint RCBJSF-IWRF Conference

Conference site

Japanese:
English:	Shimane