Optimization of Deposition Conditions of Y-doped SrZrO3 Thin Films Fabricated by Pulsed Laser Deposition Method

Publication Information

Title

Japanese:
English:	Optimization of Deposition Conditions of Y-doped SrZrO3 Thin Films Fabricated by Pulsed Laser Deposition Method

Author

Japanese:	Kiyoshi Uchiyama, Hiroki Tanaka, Takahiro Oikawa, 舟窪浩.
English:	Kiyoshi Uchiyama, Hiroki Tanaka, Takahiro Oikawa, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 4, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IUMRS-ICEM2016 (International Union of Materials Research Societies - International Conference on Electronic Materials)

Conference site

Japanese:
English: