Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices

Publication Information

Title

Japanese:
English:	Effects of Bi-Layered Au/Ti Structure on Mechanical Properties of Micro-Cantilever Evaluated by Micro-Bending Test Toward Applications in MEMS Devices

Author

Japanese:	Hashigata Ken, Tang Hao-Chun, 陳君怡, Chang Tso-Fu Mark, 山根大輔, 町田克之, 益一哉, 曽根正人.
English:	Ken Hashigata, Hao-Chun Tang, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	MNE2017

Volume, Number, Page

Published date

Sept. 18, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	43rd International Conference on Micro & Nano Engineering (MNE2017)

Conference site

Japanese:
English:	Braga