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Title
Japanese: 
English:Long-Term Vibration Characteristics of MEMS Inertial Sensors by Multi-Layer Metal Technology 
Author
Japanese: 山根 大輔, 小西 敏文, 佐布 晃昭, 橘 航一朗, 寺西 美波, 陳 君怡, Chang Tso-Fu Mark, 曽根 正人, 町田 克之, 益 一哉.  
English: Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Koichiro Tachibana, Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone, Katsuyuki Machida, Kazuya Masu.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 2187-2190
Published date June 18, 2017 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:The 19th Int. Conf. on Solid-State Sensors, Actuators and Microsystems (Transducers 2017) 
Conference site
Japanese: 
English:Kaohsiung 
Official URL http://www.transducers2017.org/
 

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