Membrane-based GaInAs/InP waveguide-type p-i-n photodetector fabricated on Si substrate using Benzocyclobutene bonding

Publication Information

Title

Japanese:
English:	Membrane-based GaInAs/InP waveguide-type p-i-n photodetector fabricated on Si substrate using Benzocyclobutene bonding

Author

Japanese:	コシチン, 瓜生達也, 井上大輔, 雨宮智宏, 西山伸彦, 荒井滋久.
English:	Zhichen Gu, Tatsuya Uryu, Daisuke Inoue, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

H-6-02

Published date

Sept. 19, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference on Solid State Devices and Materials (SSDM2017)

Conference site

Japanese:
English:	Sendai