III-V/SOIハイブリッドデバイスのSi導波路結合器部のテーパ先端幅許容度向上に向けた検討

Publication Information

Title

Japanese:	III-V/SOIハイブリッドデバイスのSi導波路結合器部のテーパ先端幅許容度向上に向けた検討
English:

Author

Japanese:	鈴木純一, 永坂久美, 雨宮智宏, 西山伸彦, 荒井滋久.
English:	Junichi Suzuki, Kumi Nagasaka, Tomohiro Amemiya, Nobuhiko Nishiyama, SHIGEHISA ARAI.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

No. 7a-A504-1

Published date

Sept. 2017

Publisher

Japanese:
English:

Conference name

Japanese:	第78回応用物理学会秋季学術講演会
English:

Conference site

Japanese:
English: