Chemical Solution Deposition of Hafnia-Zirconia Ultrathin Films for Ferroelectric Capacitor

Publication Information

Title

Japanese:
English:	Chemical Solution Deposition of Hafnia-Zirconia Ultrathin Films for Ferroelectric Capacitor

Author

Japanese:	内田寛, Syuhei Nakayama, Hiroaki Kawashima, Takahisa Shiraishi, 清水荘雄, 舟窪浩.
English:	Hiroshi Uchida, Syuhei Nakayama, Hiroaki Kawashima, Takahisa Shiraishi, Takao Shimizu, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 4, 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:	AMEC 2016 (The 10th Asian Meeting on Electroceramics)

Conference site

Japanese:
English:	Taipei