Growth of epitaxial orthorhomibic doped HfO2 thin films | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Growth of epitaxial orthorhomibic doped HfO2 thin films

Author

Japanese:	清水荘雄, 舟窪浩.
English:	T. Shimizu, H. Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 9, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Novel High k Application Workshop 2017

Conference site

Japanese:
English:	Dresden

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