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Title
Japanese:スパッタリング法によるY2O3-HfO2強誘電体エピタキシャル薄膜作製とその評価 
English: 
Author
Japanese: 鈴木大生, 三村和仙, 清水荘雄, 内田寛, 舟窪浩.  
English: Taisei Suzuki, Takanori Mimura, Takao Shimizu, Hiroshi Uchida, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 14, 2017 
Publisher
Japanese: 
English: 
Conference name
Japanese:第64回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:横浜市 
English: 

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