MEMS加速度センサ用高分解能容量検出回路の評価

Publication Information

Title

Japanese:	MEMS加速度センサ用高分解能容量検出回路の評価
English:	An evaluation of capacitive sensor circuit for MEMS accelerometers

Author

Japanese:	高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 町田克之, 石原昇, 益一哉.
English:	Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 26, 2017

Publisher

Japanese:
English:

Conference name

Japanese:	第8回集積化MEMS技術研究ワークショップ
English:

Conference site

Japanese:	香川県
English: