積層メタル技術を用いた高感度MEMS傾斜計の検討

Publication Information

Title

Japanese:	積層メタル技術を用いた高感度MEMS傾斜計の検討
English:	A Study on a High-Resolution MEMS Tilt Sensor Fabricated by Multi-layer Metal Technology

Author

Japanese:	辻一平, 高安基大, 伊藤浩之, 山根大輔, 小西敏文, 道正志郎, 石原昇, 町田克之, 益一哉.
English:	Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Shiro Dosho, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

July 26, 2017

Publisher

Japanese:
English:

Conference name

Japanese:	第8回集積化MEMS技術研究ワークショップ
English:

Conference site

Japanese:	香川県
English:

Official URL