LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY

Publication Information

Title

Japanese:
English:	LONG-TERM VIBRATION CHARACTERISTICS OF MEMS INERTIAL SENSORS BY MULTI-LAYER METAL TECHNOLOGY

Author

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Volume, Number, Page

pp. 2187 - 2190

Published date

Aug. 18, 2017

Publisher

Japanese:
English:	IEEE Conference Publications

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI