Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components

Publication Information

Title

Japanese:
English:	Long-Term Vibration Test and Structure Stability of Ti/Au Micro-Cantilever as MEMS Components

Author

Japanese:	橘航一朗, 陳君怡, Chang Tso-Fu Mark, 山根大輔, 小西敏文, 町田克之, 益一哉, 曽根正人.
English:	Koichiro Tachibana, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IUMRS International Conference in Asia (IUMRS-ICA) 2017

Conference site

Japanese:
English:	Taipei