積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討

Publication Information

Title

Japanese:	積層メタル技術を用いた高感度MEMS慣性センサの傾斜計応用の検討
English:	A Tilt Sensor Using a High-Resolution MEMS Inertial Sensor Fabricated by Multi-Layer Metal Technology

Author

Japanese:	辻一平, 高安基大, 伊藤浩之, 山根大輔, 道正志郎, 小西敏文, 石原昇, 町田克之, 益一哉.
English:	Ippei Tsuji, Motohiro Takayasu, Hiroyuki Ito, Daisuke Yamane, Shiro Dosho, Toshifumi Konishi, Noboru Ishihara, Katsuyuki Machida, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 5, 2017

Publisher

Japanese:
English:

Conference name

Japanese:	第78回応用物理学会秋季学術講演会
English:	The 78th JSAP Autumn Meeting, 2017

Conference site

Japanese:	福岡県
English:

Official URL