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Title
Japanese: 
English:Fabrication and Fluorine Plasma Irradiation Behavior of YOF Ceramics 
Author
Japanese: 津之浦 徹, 吉田 克己, 矢野 豊彦.  
English: Toru Tsunoura, Katsumi Yoshida, Toyohiko Yano.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         P-18
Published date Nov. 21, 2016 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:The 38th International Symposium on Dry Process (DPS2016) 
Conference site
Japanese:札幌 
English:Sapporo 

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