A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors

Publication Information

Title

Japanese:
English:	A capacitive sensor circuit based on relaxation oscillator for sub-1mG MEMS inertial sensors

Author

Japanese:	高安基大, 道正志郎, 伊藤浩之, 山根大輔, 小西敏文, 町田克之, 石原昇, 益一哉.
English:	Motohiro Takayasu, Shiro Dosho, Hiroyuki Ito, Daisuke Yamane, Toshifumi Konishi, Katsuyuki Machida, Noboru Ishihara, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 19, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2017 International Conference on Solid State Devices and Materials (SSDM 2017)

Conference site

Japanese:	宮城県
English:	Miyagi