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Publication Information
Title
Japanese:
English:
Tilt Characteristics of a MEMS Accelerometer fabricated by Multi-layer Metal Technology
Author
Japanese:
辻 一平
,
高安 基大
,
伊藤 浩之
,
山根 大輔
,
道正 志郎
,
小西 敏文
,
石原 昇
,
町田 克之
,
益 一哉
.
English:
Ippei Tsuji
,
Motohiro Takayasu
,
Hiroyuki Ito
,
Daisuke Yamane
,
Shiro Dosho
,
Toshifumi Konishi
,
Noboru Ishihara
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Sept. 19, 2017
Publisher
Japanese:
English:
Conference name
Japanese:
English:
2017 International Conference on Solid State Devices and Materials (SSDM 2017)
Conference site
Japanese:
宮城県
English:
Miyagi
Official URL
http://www.ssdm.jp/
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Tokyo Institute of Technology All rights reserved.