SU-8自立型微細構造体の製作と接合

Publication Information

Title

Japanese:	SU-8自立型微細構造体の製作と接合
English:	Fabrication and Bonding of SU-8 Free-standing Microstructures

Author

Japanese:	MAO ZEBING, 吉田和弘, 金俊完.
English:	ZEBING MAO, KAZUHIRO YOSHIDA, Joon-wan KIM.

Language

Japanese

Journal/Book name

Japanese:	山梨講演会2017 講演論文集（ＣＤ-ＲＯＭ）
English:

Volume, Number, Page

No. 170-3 pp. 35-36

Published date

Oct. 18, 2017

Publisher

Japanese:
English:

Conference name

Japanese:	山梨講演会2017
English:

Conference site

Japanese:	山梨県
English:

Official URL