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Publication Information
Title
Japanese:
積層メタル技術によるMEMS加速度センサの傾斜時感度特性の検討
English:
Inclining Angle Sensitivity Characteristics of MEMS Accelerometer Fabricated by Multi-Layer Metal Technology
Author
Japanese:
古賀 達也
,
辻 一平
,
高安 基大
,
伊藤 浩之
,
山根 大輔
,
道正 志郎
,
小西 敏文
,
石原 昇
,
町田 克之
,
益 一哉
.
English:
Tatsuya Koga
,
Ippei Tsuji
,
Motohiro Takayasu
,
Hiroyuki Ito
,
Daisuke Yamane
,
Shiro Dosho
,
Toshifumi Konishi
,
Noboru Ishihara
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Oct. 31, 2017
Publisher
Japanese:
English:
Conference name
Japanese:
第9回 集積化MEMSシンポジウム
English:
The 9th Symposium on Integrated MEMS Technology
Conference site
Japanese:
広島県
English:
Official URL
http://annex.jsap.or.jp/MEMS/
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Tokyo Institute of Technology All rights reserved.