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Publication Information
Title
Japanese:
積層メタル技術を用いたMEMS慣性センサの構造設計のための粘性定数モデルの検討
English:
Author
Japanese:
小西 敏文
,
山根 大輔
,
佐布 晃昭
,
曽根 正人
,
年吉 洋
,
益 一哉
,
町田 克之
.
English:
Toshifumi Konishi
,
Daisuke Yamane
,
Teruaki Safu
,
Masato Sone
,
Hiroshi Toshiyoshi
,
Kazuya Masu
,
Katsuyuki Machida
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Oct. 31, 2017
Publisher
Japanese:
English:
Conference name
Japanese:
第9回集積化MEMSシンポジウム
English:
Conference site
Japanese:
広島県
English:
Official URL
http://annex.jsap.or.jp/MEMS/
©2007
Tokyo Institute of Technology All rights reserved.