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Title
Japanese:裏面露光による電極アレー構造の製作(第2報)熱処理による金薄膜の密着性向上 
English: 
Author
Japanese: 黒坂幹哉, 朴鍾淏, 栁田保子, 初澤毅.  
English: Mikiya Kurosaka, Jongho Park, Yasuko YANAGIDA, TAKESHI HATSUZAWA.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Sept. 20, 2017 
Publisher
Japanese: 
English: 
Conference name
Japanese:2017年度精密工学会秋季大会 
English: 
Conference site
Japanese:大阪府 
English: 

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