ハイブリッド集積に向けたAr-FAB表面活性化接合法のInP/Si接合特性の検討

Publication Information

Title

Japanese:	ハイブリッド集積に向けたAr-FAB表面活性化接合法のInP/Si接合特性の検討
English:	Investigation of InP/Si bonding characteristics of Ar-FAB surface activated bonding for hybrid integration

Author

Japanese:	永坂久美, 鈴木純一, 御手洗拓矢, 王雨寧, 雨宮智宏, 西山伸彦, 荒井滋久.
English:	Kumi Nagasaka, Junichi Suzuki, Takuya Mitarai, Yuning Wang, Tomohiro Amemiya, Nobuhiko Nishiyama, Shigehisa Arai.

Language

Japanese

Journal/Book name

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English:

Volume, Number, Page

Published date

Mar. 2018

Publisher

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Conference name

Japanese:	応用物理学会春季学術講演会
English:	The 65th JSAP Spring Meeting, 2018

Conference site

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English: