Study on the Optimization of MEMS Fabrication for ECF (Electro-conjugate Fluid) Micropumps and Its Application to Soft Robots

Publication Information

Title

Japanese:	ECFマイクロポンプのMEMS製作における最適化とこのマイクロポンプのソフトロボットへの応用
English:	Study on the Optimization of MEMS Fabrication for ECF (Electro-conjugate Fluid) Micropumps and Its Application to Soft Robots

Author

Japanese:	HANDONG.
English:	Dong Han.

Type

Type:	Thesis (Ph.D.)
Country:	Japan

Language

English

Organization name

Tokyo Institute of Technology

Report number

甲第10880号

Conferred date

2018/03/26

Judge