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Title
Japanese:大気圧非平衡Arプラズマの発光分光法による電子温度の計測 
English:OES Measurement of Electron Temperature of Non-equilibrium Atmospheric-pressure Ar Plasma 
Author
Japanese: 箱崎喜郎, 大西広, 根津篤, 赤塚洋.  
English: Yoshiro Hakozaki, Hiroshi Onishi, Atsushi Nezu, Hiroshi Akatsuka.  
Language Japanese 
Journal/Book name
Japanese:2018年第65回応用物理学会春季学術講演会[講演予稿集] 
English:Extended abstracts of the 65th JSAP Spring Meeting, 2018 
Volume, Number, Page         pp. 07-025
Published date Mar. 5, 2018 
Publisher
Japanese:公益社団法人 応用物理学会 
English:The Japan Society of Applied Physics 
Conference name
Japanese:2018年第65回応用物理学会春季学術講演会 
English:The 65h JSAP Spring Meeting, 2018 
Conference site
Japanese:東京 
English:Tokyo 
Official URL https://confit.atlas.jp/guide/event/jsap2018s/subject/17p-C204-5/tables?cryptoId=
 
Abstract There are few reports of measurements of the electron temperature (Te) of atmospheric-pressure non-equilibrium plasma. Therefore, we tried to measure Te of the atmospheric-pressure Ar non-equilibrium plasma by OES measurement of continuum spectra and by CR model interpretation of the line spectral intensity. As a result, we found that the excitation temperature of 4p-5p to be 3500-4100 K, and the resultant Te deduced from the CR model calculation to be about 0.5-0.8 eV. This value almost agreed with the one estimated from the continuum spectra.

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