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Title
Japanese:高感度MEMS加速度センサのBrownian Noise評価に関する検討 
English: 
Author
Japanese: 新島 宏文, 乙部 翔太, 高安 基大, 山根 大輔, 小西 敏文, 佐布 晃昭, 伊藤 浩之, 年吉 洋, 町田 克之, 益 一哉.  
English: Hirofumi Niijima, Shouta Otobe, Motohiro Takayasu, Daisuke Yamane, Toshifumi Konishi, Teruaki Safu, Hiroyuki Ito, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 17, 2018 
Publisher
Japanese: 
English: 
Conference name
Japanese:第64回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:東京都 
English: 

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