Study on the fabrication of a SU-8 cantilever vertically-allocated in a closed fluidic microchannel

Publication Information

Title

Japanese:
English:	Study on the fabrication of a SU-8 cantilever vertically-allocated in a closed fluidic microchannel

Author

Japanese:	Mao Zebing, 吉田和弘, 金俊完.
English:	Zebing Mao, Kazuhiro Yoshida, Joon-wan Kim.

Language

English

Journal/Book name

Japanese:
English:	Microsystem Technologies

Volume, Number, Page

Volume 24 No. 5 pp. 2473–2483

Published date

Oct. 28, 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI