DLC coating on a trench-shaped target by bipolar PBII

Publication Information

Title

Japanese:
English:	DLC coating on a trench-shaped target by bipolar PBII

Author

Japanese:	平田祐樹, 崔埈豪, 加藤孝久.
English:	Yuki Hirata, Junho Choi, Takahisa Kato.

Language

English

Journal/Book name

Japanese:
English:	International Journal of Refractory Metal and Hard Materials

Volume, Number, Page

Vol. 49

Published date

Mar. 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: