Microstructure of a-C:H film prepared on micro trench and analysis of ions and radicals behavior | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Microstructure of a-C:H film prepared on micro trench and analysis of ions and radicals behavior

Author

Japanese:	平田祐樹, 崔埈豪.
English:	Yuki Hirata, Junho Choi.

Language

English

Journal/Book name

Japanese:
English:	Journal of Applied Physics

Volume, Number, Page

Published date

Aug. 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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