Deposition of a-C:H Films on a Nanotrench Pattern by Bipolar PBII&amp;D

Publication Information

Title

Japanese:
English:	Deposition of a-C:H Films on a Nanotrench Pattern by Bipolar PBII&D

Author

Japanese:	平田祐樹, Yuya Nakahara, Keisuke Nagato, 崔埈豪.
English:	Yuki Hirata, Yuya Nakahara, Keisuke Nagato, Junho Choi.

Language

English

Journal/Book name

Japanese:
English:	Journal of Physics D: Applied Physics

Volume, Number, Page

Published date

Mar. 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: