Deposition of a-C:H films on inner surface of high-aspect-ratio microchannel | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Deposition of a-C:H films on inner surface of high-aspect-ratio microchannel

Author

Japanese:	平田祐樹, 崔埈豪.
English:	Yuki Hirata, Junho Choi.

Language

English

Journal/Book name

Japanese:
English:	Journal of Applied Physics

Volume, Number, Page

Vol. 120

Published date

Aug. 2016

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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