Structure and mechanical properties of a-C:H films deposited on a three-dimensional target: Comparative study on target scale and aspect ratio

Publication Information

Title

Japanese:
English:	Structure and mechanical properties of a-C:H films deposited on a three-dimensional target: Comparative study on target scale and aspect ratio

Author

Japanese:	平田祐樹, 崔埈豪.
English:	Y Hirata, J Choi.

Language

English

Journal/Book name

Japanese:
English:	Journal of Physics D: Applied Physics

Volume, Number, Page

Published date

Mar. 2017

Publisher

Japanese:
English:

Conference name

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English:

Conference site

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English: