Analysis of microstructure and surface morphology of a-C:H films deposited on a trench target

Publication Information

Title

Japanese:
English:	Analysis of microstructure and surface morphology of a-C:H films deposited on a trench target

Author

Japanese:	平田祐樹, Takumi Ishikawa, 崔埈豪, Shinya Sasaki.
English:	Yuki Hirata, Takumi Ishikawa, Junho Choi, Shinya Sasaki.

Language

English

Journal/Book name

Japanese:
English:	Diamond & Related Materials

Volume, Number, Page

Vol. 83

Published date

Mar. 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: