Structural and Mechanical Properties of Amorphous Carbon Films Deposited on the Micro-trench Patterns by Bipolar PBII and Plasma Analysis

Publication Information

Title

Japanese:
English:	Structural and Mechanical Properties of Amorphous Carbon Films Deposited on the Micro-trench Patterns by Bipolar PBII and Plasma Analysis

Author

Japanese:	平田祐樹, 崔埈豪.
English:	Yuki Hirata, Junho Choi.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of International Tribology Conference, Tokyo 2015

Volume, Number, Page

Published date

Sept. 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Tribology Conference, Tokyo 2015

Conference site

Japanese:
English:	Tokyo