Amorphous Carbon Film as a Mold Release Layer for Nanoimprint Lithography

Publication Information

Title

Japanese:
English:	Amorphous Carbon Film as a Mold Release Layer for Nanoimprint Lithography

Author

Japanese:	平田祐樹, Yuya Nakahara, Keisuke Nagato, 加藤孝久, 崔埈豪.
English:	Yuki Hirata, Yuya Nakahara, Keisuke Nagato, Takahisa Kato, Junho Choi.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of International Tribology Conference, Tokyo 2015

Volume, Number, Page

Published date

Sept. 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Tribology Conference, Tokyo 2015

Conference site

Japanese:
English:	Tokyo

Award

Best Poster Award & Taiho Encouraging Award for Young Tribologists