DLC coating on a trench-shaped target by bipolar PBII

Publication Information

Title

Japanese:
English:	DLC coating on a trench-shaped target by bipolar PBII

Author

Japanese:	平田祐樹, 加藤孝久, 崔埈豪.
English:	Yuki Hirata, Takahisa Kato, Junho Choi.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of 10th International Conference on the Science of Hard Materials

Volume, Number, Page

Published date

Mar. 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	10th International Conference on the Science of Hard Materials

Conference site

Japanese:	Cancun
English: