Analysis of microstructure and surface morphology of a-C:H films deposited on a trench target

Publication Information

Title

Japanese:
English:	Analysis of microstructure and surface morphology of a-C:H films deposited on a trench target

Author

Japanese:	平田祐樹, 崔埈豪, Shinya Sasaki.
English:	Yuki Hirata, Junho Choi, Shinya Sasaki.

Language

English

Journal/Book name

Japanese:
English:	Abstracts of 28th International Conference on Diamond and Carbon Materials

Volume, Number, Page

Published date

Sept. 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	28th International Conference on Diamond and Carbon Materials

Conference site

Japanese:
English:	Göthenburg