DEPENDENCE ON PRECURSOR GAS ON THE a-C:H FILM  PROPERTIES DEPOSITED ON A TRENCH TARGET

Publication Information

Title

Japanese:
English:	DEPENDENCE ON PRECURSOR GAS ON THE a-C:H FILM PROPERTIES DEPOSITED ON A TRENCH TARGET

Author

Japanese:	平田祐樹, Kanju Kitamura, Shinya Sasaki, 崔埈豪.
English:	Yuki Hirata, Kanju Kitamura, Shinya Sasaki, Junho Choi.

Language

English

Journal/Book name

Japanese:
English:	Abstracts of XXVI International Materials Research Congress

Volume, Number, Page

Published date

Aug. 2017

Publisher

Japanese:
English:

Conference name

Japanese:
English:	XXVI International Materials Research Congress

Conference site

Japanese:
English:	Cancun