Deposition of a-C:H film on inner surface of microchannel | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Deposition of a-C:H film on inner surface of microchannel

Author

Japanese:	平田祐樹, 崔埈豪.
English:	Yuki Hirata, Junho Choi.

Language

English

Journal/Book name

Japanese:	第25 回日本MRS 年次大会予稿集
English:

Volume, Number, Page

Published date

Dec. 2015

Publisher

Japanese:
English:

Conference name

Japanese:	第25 回日本MRS 年次大会
English:

Conference site

Japanese:	神奈川県
English:

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