UV Raman Study of a-C:H Films Deposited on Trench Sidewall

Publication Information

Title

Japanese:
English:	UV Raman Study of a-C:H Films Deposited on Trench Sidewall

Author

Japanese:	崔埈豪, Hayato Shimozono, 平田祐樹, Setsuo Nakao, Haruyuki Yasui.
English:	Junho Choi, Hayato Shimozono, Yuki Hirata, Setsuo Nakao, Haruyuki Yasui.

Language

English

Journal/Book name

Japanese:	第25 回日本MRS 年次大会予稿集
English:

Volume, Number, Page

Published date

Dec. 2015

Publisher

Japanese:
English:

Conference name

Japanese:	第25 回日本MRS 年次大会
English:

Conference site

Japanese:	神奈川県
English: