The effects of negative bias voltage on the structural and mechanical properties of amorphous carbon film deposited on the micro-trench patterns

Publication Information

Title

Japanese:
English:	The effects of negative bias voltage on the structural and mechanical properties of amorphous carbon film deposited on the micro-trench patterns

Author

Japanese:	平田祐樹, 崔埈豪.
English:	Yuki Hirata, Junho Choi.

Language

English

Journal/Book name

Japanese:
English:	Abstracts of Materials Today Asia 2014

Volume, Number, Page

Published date

Dec. 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Materials Today Asia 2014

Conference site

Japanese:
English:	Kowloon