DLC coating on a micro-trench using bipolar PBII

Publication Information

Title

Japanese:
English:	DLC coating on a micro-trench using bipolar PBII

Author

Japanese:	崔埈豪, Hideyuki Tokioka, Wonsoon Park, 平田祐樹, 加藤孝久.
English:	Junho Choi, Hideyuki Tokioka, Wonsoon Park, Yuki Hirata, Takahisa Kato.

Language

English

Journal/Book name

Japanese:
English:	Abstracts of Collaborative Conference on Materials Research 2013

Volume, Number, Page

Published date

June 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Collaborative Conference on Materials Research 2013

Conference site

Japanese:
English:	Jeju island