Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology

Publication Information

Title

Japanese:
English:	Temperature Characteristics of MEMS Inertial Sensor Fabricated by Gold Multi-Layer Metal Technology

Author

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. WM-II-f₃243

Published date

Apr. 21, 2018

Publisher

Japanese:
English:

Conference name

Japanese:
English:	13th Annual IEEE International Conference on Nano-Micro Engineered and Molecular Systems (IEEE NEMS 2018)

Conference site

Japanese:
English:

Official URL