Erosion of fluorinated diamond-like carbon films by exposure to soft X-rays

Publication Information

Title

Japanese:	Erosion of fluorinated diamond-like carbon films by exposure to soft X-rays
English:	Erosion of fluorinated diamond-like carbon films by exposure to soft X-rays

Author

Japanese:	Kazuhiro Kanda, Hiroki Takamatsu, Eri Miura-Fujiwara, 赤坂大樹, Akihiro Saiga, Koji Tamada.
English:	Kazuhiro Kanda, Hiroki Takamatsu, Eri Miura-Fujiwara, Hiroki Akasaka, Akihiro Saiga, Koji Tamada.

Language

English

Journal/Book name

Japanese:	Japanese Journal of Applied Physics
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 57 045501

Published date

Feb. 22, 2018

Publisher

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English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI